Suomija – Matuokliai – Request for market information: Mercury CV prober for semiconductor wafer analysis

Suomija – Matuokliai – Request for market information: Mercury CV prober for semiconductor wafer analysis

I dalis: Perkančioji organizacija

I.1) Pavadinimas ir adresai:

Oficialus pavadinimas: VTT Technical Research Centre of Finland Ltd
Adresas: P.O. Box 1000, VTT
Miestas: VTT
Pašto kodas: 02044
Šalis: Suomija
Asmuo ryšiams:
El-paštas: kilpailutus@vtt.fi
Interneto adresas (-ai):
Pagrindinis adresas: https://www.vttresearch.com/fi

II dalis: Objektas

II.1.1) Pavadinimas:

Request for market information: Mercury CV prober for semiconductor wafer analysis
Nuorodos numeris: 28/206/2025

II.1.2) Pagrindinis BVPŽ kodas:

38300000 Matuokliai

II.1.3) Sutarties tipas:

Kita

II.1.4) Trumpas aprašymas:

The object of the request for information is a Mercury CV prober for semiconductor wafer analysis. The system needs to contain a Mercury CV probe, accessory and safety equipment. Required specifications are described in more detail below. Specifications: Mercury CV prober o Manual wafer loading o Wafer size: 20x20 mm coupons to 300 mm wafers o Mapping of up to 300 mm wafers o C-V and I-V measurements using top and bottom side return contacts o Mercury contact spot size: max 1 mm o DC BIAS: up to +-3kV o AC frequency range: 50 Hz - 1 MHz o Full computer control of measurements, wafer mapping, data analysis and storage. Facility requirements: o Designed for cleanroom use: Will be installed in a ISO4 or ISO6 cleanroom o Cabinet extract with mercury vapor filtering inside the tool cabinet o Mercury vapor concentration measurement inside the tool cabinet o Cleanroom floor space requirement: max 2x2m (excluding service area) Schedule: o The delivery must take place in 2025

II.2) Aprašymas:

II.2.1) Kitas (-i) šio pirkimo BVPŽ kodas (-ai):

38300000 Matuokliai