Vokietija – Įvairios specialios paskirties mašinos – Process Monitoring Tool

Vokietija – Įvairios specialios paskirties mašinos – Process Monitoring Tool

I dalis: Perkančioji organizacija

I.1) Pavadinimas ir adresai:

Oficialus pavadinimas: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
Adresas: Am Wolfsmantel 33
Miestas: Erlangen
Pašto kodas: 91058
Šalis: Vokietija
Asmuo ryšiams:
El-paštas: einkauf@iis.fraunhofer.de
Interneto adresas (-ai):
Pagrindinis adresas: https://www.deutsche-evergabe.de

II dalis: Objektas

II.1.1) Pavadinimas:

Process Monitoring Tool
Nuorodos numeris: PR1034394 (brueckne)

II.1.2) Pagrindinis BVPŽ kodas:

42990000 Įvairios specialios paskirties mašinos

II.1.3) Sutarties tipas:

Kita

II.1.4) Trumpas aprašymas:

Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to the existing measurement tool. The system is also able to introduce 200 mm Wafers into a suitable adapter enabling processing on standard 300 mm tools and handle the 200 mm wafers in adapter into a SEMI standard 300 mm FOUP.

II.2) Aprašymas:

II.2.1) Kitas (-i) šio pirkimo BVPŽ kodas (-ai):

42990000 Įvairios specialios paskirties mašinos